WSM1200 is a high-end device specially designed for accurate measurement of wafer surface. The system features a single wafer load port that accommodates 6-inch and 8-inch SEMI-standard open cassettes. The system is also equipped with a HIRATA three-axis robotic arm (radius, rotation, height), wafer pre-aligner and wafer scanning sensor, which can provide higher performance and efficient wafer handling. WSM1200 has excellent wafer surface detection function, and is equipped with the latest SENSOFAR S NEOX 3D optical profiler, which can collect measurement data at a high speed up to 180FPS. The S NEOX sensor is also equipped with high-end measurement technologies such as confocal, Ai multi-focal plane stacking, optical interference, etc., and minimizes noise in data acquisition. The system is equipped with a precision air flotation anti-vibration table, which can effectively collect more accurate measurement data on the wafer surface. WSM1200 is the ideal choice for wafer surface measurement.