The MPS2100 is the newest high-resolution analyzer from Chapman Instruments. Specifically designed for surface measurement and analysis, it can be used both as a production tool for in-line quality inspection and as a research and development tool for establishing standards and studying tolerances. Using the same non-contact measurement technology as other Chapman analyzers, the MPS2100 allows users to quickly perform high-resolution linear or circular scans. The powerful, user-friendly Windows®-based operating software can be programmed to execute a range of routines and report on-line production data for further analysis. Password security and event viewer/error logging come standard with Chapman software. Optional robotic arm for handling 150mm, 200 mm and 300 mm wafers.
MPS2100 Wafer Roughness Measurement System
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Fast, comprehensive circular scan (360° around wafer surface)
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Nomarski Viewing System for High Definition Optical Inspection
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Scan lengths from µm to full circumference (8" or 12" wafers)
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Acquire roughness and waviness data in a single scan
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Non-contact 3D scanning
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Automatic sample positioning (X, Y, θ)
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Customized measurement sequences for multiple scans with one key
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Autofocus acquisition
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Closed-loop autofocus system allows to maintain focus while scanning samples with varying terrain
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Optional robotic arm operation
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