The WIS8000 is designed to handle 8-inch wafers and 12-inch size wafers. Standard design with two standard load ports to accommodate 12" SEMI standard FOUP, 12" SEMI standard FOSB and 8" SEMI_cc781905-5cde-3194- bb3b-136bad5cf58d_Standard open cassette. It can be upgraded to three loading ports. During wafer handling, the system uses robotic arms to transfer wafers to and from pre-aligners or inspection chucks. In addition, the WIS8000 is equipped with a wafer holder, tilt capability for front and rear wafer inspection (macro inspection), and a high-power microscope with 5 objective lenses for micro inspection.
WIS8000 The first optical detection system
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Designed for 8" and 12" wafers
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Equipped with 2 Hirata FOUP FOUP/FOSB accommodating d_port, requires Hirata adapter for In 8 inch open cassette.
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R-θ Wafer Handling System
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Hirata Wafer Aligner (8" and 12" Wafer)
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Programmable Motorized Stage with Vacuum Chuck
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Wafer Mapping System
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Anti-vibration isolation platform
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IOSS WID120 OCR Reader
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TCP-IP and RS232 data interface
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