The WIS8000 is designed to handle 8-inch wafers and 12-inch size wafers. Standard design with two standard load ports to accommodate 12" SEMI standard FOUP, 12" SEMI standard FOSB and 8" SEMI_cc781905-5cde-3194- bb3b-136bad5cf58d_Standard open cassette. It can be upgraded to three loading ports. During wafer handling, the system uses robotic arms to transfer wafers to and from pre-aligners or inspection chucks. In addition, the WIS8000 is equipped with a wafer holder, tilt capability for front and rear wafer inspection (macro inspection), and a high-power microscope with 5 objective lenses for micro inspection.
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