The WIS1100 is designed to handle 4" and 6" wafer sizes for optical inspection, wafer mapping and defect classification management in the semiconductor industry. The system is equipped with high-performance front and rear wafer macro inspection systems, including micro inspection systems. In addition, the microscopic inspection system integrates Nikon Eclipse L200N and 5 motorized objective lenses. The wafer aligner is to ensure the accuracy of wafer centering and positioning before unloading, and the OCR reader is used for mapping retrieval from the host server to improve processing efficiency.
