The WTS300G is designed to transfer, split, merge or flip 6-inch wafers and 8-inch wafers from an input cassette in batch mode. The input cassette types are SEMI standard open cassettes with 26 slots, 25 slots and 13 slots. It consists of four loadports, three of which are input loadports and one is an output loadport. The system is equipped with high-precision reflective sensors for detecting wafer protrusion.
