WID100R is mainly designed for 4-inch wafers. It is designed with a single port for use with 4" SEMI standard 25-slot open cassettes. The system can realize the alignment and wafer ID reading of the whole batch of wafers in the wafer cassette. With its multi-touch panel PC and easy-to-operate system, users can read any wafer ID and slot position inside the carrier within seconds. The compact design of the WID100R is equipped with cassette status and tilt sensors for cassette placement and wafer ID placement. Mapping, wafer alignment and wafer ID reading are controlled by created recipes.
WID100R Wafer Lot ID Reader System
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Designed for 4-inch wafer
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1 open cassette base station (based on sample cassette provided)
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Cassette Orientation Sensor (detects cassette upside down), Cassette Status and Cassette Tilt Sensor.
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In-cassette wafer slot mapping function
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Integrated wafer orientation plane alignment mechanism
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Programmable wafer rotation for various wafer ID positions
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Batch wafer ID reading (wafer ID of front and back and orientation plane area)
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Recipe Control Mapping, Alignment and Wafer ID Read
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SECS/GEM communication tool (optional)
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