The WTS100G is designed to transfer, split, merge or flip 4" and 6" wafers from an input cassette in batch mode. It consists of two loadports, an input loadport and an output loadport. The load port is equipped with high-precision sensors for wafer mapping inspection and cassette placement inspection. Wafers are transferred from a 4" SEMI standard open cassette to a 4" SEMI standard open/clamshell cassette or from a 6" SEMI standard open cassette to a 6" depending on the tool's sorting method SEMI standard open/clamshell cassette.
WTS100G Wafer batch handling system
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Designed for 4" and 6" wafers
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Cassette type: SEMI standard open cassette and clamshell cassette
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Consists of two load ports (one input port and one output port)
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Built-in Programmable Wafer Orientation Planar Alignment
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In-cassette wafer mapping function
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Batch wafer transfer from input cassette to output cassette
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Single wafer sorting (sequential wafer alignment)
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Batch wafer consolidation (odd + even slots)
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TCP/IP network, used to interface with the host map server and store map data through the network
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SECS/GEM communication tool (optional)
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