The WSS2200B is designed with four standard load ports to support 6-inch and 8-inch size wafers. The ports are designed to handle 6" SEMI standard open cassettes and 8" SEMI standard open cassettes. During the wafer sorting process, the robotic arm moves to the designated input load port for the wafer loading process. Movement in the X, Y, and Z axes is controlled by a Hirata robotic arm controller. The wafer loaded from the input load port is transferred to the pre-aligner for wafer orientation check and the aligned wafer ID is read by OCR and recorded to PC/server via TCP/IP or SECS/GEM. Wafers are transferred from the input loadport to the output loadport via recipe control. ​