The WPS3800 is designed to handle the packing and unpacking process of 8" and 12" wafers on various types of shipping carriers. The system is equipped with two load ports for 8" SEMI standard open cassette and 12" FOUP cassette or 12" FOSB cassette, and two for 8" cassette and 12" cassette A loading port (configurable for 1 wafer cassette and 1 wafer tank with optional Cartesian robot module), and a port for liner (for automatic changeover of 8" and 12" wafers). The WPS3800 has built-in vision sensors for wafer, liner or ring spacer detection, as well as built-in height sensors on cassette and canister load ports to ensure robot accuracy during pick and place.
WPS3800 Wafer Packaging and Unpacking System
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Equipped with 2 FOUP/FOSB for 12" wafers and open cassette for 8" wafers with integrated wafer protrusion detection sensor and through-beam wafer mapping, 2 for each type Universal transport carrier station for cassettes and cans with automatic detection of 8" and 12" size wafers
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1 liner port (automatically switches between 8" and 12" liner)
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Hirata 4-axis ATM robot arm with flip axis, flip axis (radius-theta-height-flip axis)
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Built-in vision sensor to detect wafer, liner or spacer, built-in height sensor to detect robot operation accuracy
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Cartesian robot module for wafer pot handling (optional)
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Wafer Ring Separator Handling Module for Cassettes (Optional
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