WID150R is mainly designed for 6-inch wafers. The system fits into a 6” SEMI standard 25-slot open cassette and features a built-in programmable wafer orientation plane alignment to ensure the wafer is in the correct orientation prior to scanning the ID. In addition, WID150R is equipped with multi-touch panel PC and GUI customization. User-friendly system interface and easy-to-operate system help users operate easily.
WID150R Wafer Lot ID Reader System
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Designed for 6-inch wafer
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1 open cassette base station (based on sample cassette provided)
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Cassette Orientation Sensor (detects cassette upside down), Cassette Status and Cassette Tilt Sensor.
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In-cassette wafer slot mapping function
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Integrated wafer orientation plane alignment mechanism
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Programmable wafer rotation for various wafer ID positions
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Batch wafer ID reading (wafer ID of front and back and orientation plane area)
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Recipe Control Mapping, Alignment and Wafer ID Read
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SECS/GEM communication tool (optional)
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