WID150R is mainly designed for 6-inch wafers. The system fits into a 6” SEMI standard 25-slot open cassette and features a built-in programmable wafer orientation plane alignment to ensure the wafer is in the correct orientation prior to scanning the ID. In addition, WID150R is equipped with multi-touch panel PC and GUI customization. User-friendly system interface and easy-to-operate system help users operate easily.

WID150R Wafer Lot ID Reader System

Designed for 6-inch wafer

1 open cassette base station (based on sample cassette provided)

Cassette Orientation Sensor (detects cassette upside down), Cassette Status and Cassette Tilt Sensor.

In-cassette wafer slot mapping function

Integrated wafer orientation plane alignment mechanism

Programmable wafer rotation for various wafer ID positions

Batch wafer ID reading (wafer ID of front and back and orientation plane area)

Recipe Control Mapping, Alignment and Wafer ID Read

SECS/GEM communication tool (optional)

WID150R Wafer Lot ID Reader System

Main features

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WID150R​ Wafer Lot ID Reader System​

Main features​

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WID150R Wafer Lot ID Reader System

Main features