The WIS1000 is designed to handle 6-inch and 8-inch wafer sizes. The standard design features a standard load port that accommodates 6" SEMI standard open cassettes and 8" SEMI standard open cassettes. The system is capable of inspection, wafer mapping and defect triage management. WIS1000 integrates Nikon wafer autoloader and programmable XY indexing stage for macro and micro inspection. It can not only perform macro inspection on the front side of the wafer, but also macro inspection and micro inspection on the back side of the wafer. An inkjet marking module can be integrated with the system for blemish marking during inspection.
WIS1000 The first optical detection system
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Designed for 6-inch and 8-inch wafers
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Micro and macro inspection (including back macro inspection)
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Brightfield, Darkfield and NIC Mode
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Integrated Nikon Autoloader and Microscope
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Motorized mirror changer with 4 objectives (5x, 10x, 20x, 50x)
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Integrated Wafer Ion Neutralizer and Programmable XY Index
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Wafer alignment and wafer mapping are available
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User Defined Rejection Code and Post Inspection Summary Lot Report
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Integrated inkjet marking machine for blemish marking (optional)
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Software user interface with recipe control module, wafer map, cassette map and microscope component control.
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