WID100R is mainly designed for 4-inch wafers. It is designed with a single port for use with 4" SEMI standard 25-slot open cassettes. The system can realize the alignment and wafer ID reading of the whole batch of wafers in the wafer cassette. With its multi-touch panel PC and easy-to-operate system, users can read any wafer ID and slot position inside the carrier within seconds. The compact design of the WID100R is equipped with cassette status and tilt sensors for cassette placement and wafer ID placement. Mapping, wafer alignment and wafer ID reading are controlled by created recipes.
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