The WTS100G is designed to transfer, split, merge or flip 4" and 6" wafers from an input cassette in batch mode. It consists of two loadports, an input loadport and an output loadport. The load port is equipped with high-precision sensors for wafer mapping inspection and cassette placement inspection. Wafers are transferred from a 4" SEMI standard open cassette to a 4" SEMI standard open/clamshell cassette or from a 6" SEMI standard open cassette to a 6" depending on the tool's sorting method SEMI standard open/clamshell cassette.
